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ATLEX-500-L/ATLEX-1000-L準分子雷射
    發布時間: 2020-12-07 17:55    
ATL
ATL Lasertechnik
New industrial excimer lasers
ATLEX-500-L/ATLEX-1000-L準分子雷射特點：
  • TMC (Total-Metal-Ceramic) Vessel
  • Corona Preionization
  • Solid state switch
  • Extended Dynamic & Static Gas-Lifetime (Several Months)
  • Laser Head Volume 6 l
  • Air Cooled / Optional Liquid Cooled
  • RS-485, RS232, USB and fiber optic Interface for system integration
  • Flushable optics holder
  • Integrated 4-Valve System for Easy Gas Handling
  • Meets European CE-standard, RoHS compliant
  • Modular Design / Service Friendly
ATLEX-500-L準分子雷射/ATLEX-1000-L 主要參數
ATLEX-500-L/ATLEX-1000-L Specifications
Gas Medium
ArF KrF Units
Wavelength
193 248 nm
High Voltage Switching Technique
Solid State Switch
Max. Pulse Energy 1
10 15 mJ
Max. Average Power
 4.0 / 8.0  6.5 / 10.0  W
Max. Rep Rate
 500 / 1000  Hz
Pulse Duration 2
5 – 8 ns
Beam Dimensions 2 (V x H)
6 x 4 mm
Beam Divergence 2 (V x H)
2 x 1 mrad
Energy Stability (standard deviation)
< 2 %
Dimensions (LxWxH) click here for details
600 x 415 x 567 mm
Weight
70 kg
Cooling
Cooling Air / Optional Liquid  
Power requirement
230 VAC / 10 A / 1 Phase / 50-60 Hz  
All specifications are typical data and subject to change without notice due to product improvements.
  • Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
  • Typical value, FWHM
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