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ATLEX-300-FBG/ATLEX-500-FBG準分子雷射
發布時間: 2020-12-08 16:25
ATL
ATLEX-300-FBG/ATLEX-500-FBG準分子雷射特點：
- Soft corona preionization
- HV-solid state pulser
- Laser head volume < 3l
- TMC (Total-Metal-Ceramic) Vessel
- Integrated vacuum pump & halogen filter
- Air Cooled / Optional Liquid Cooled, active thermal management
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Energy stabilization mode
- Meets European CE-standard
- RoHS compliance
|
ATLEX-300-FBG/ATLEX-500-FBG Specifications
|
|||
|
Gas Medium
|
ArF | KrF | Units |
|
Wavelength
|
193 | 248 | nm |
|
High Voltage Switching Technique
|
Solid State Switch | ||
|
Max. Pulse Energy 1
|
10 | 15 | mJ |
|
Max. Average Power
|
2.4 / 4.0 | 4.0 / 6.5 |
W |
| Spatial Coherence (Vertical Beam Direction) | >300 | >300 | µm |
|
Max. Rep Rate
|
300 / 500 |
Hz |
|
|
Pulse Duration 2
|
5 – 8 | ns | |
|
Beam Dimensions 2 (V x H)
|
4 x 6 | mm | |
|
Beam Divergence 2 (V x H)
|
1 x 2 | mrad | |
|
Energy Stability (standard deviation)
|
< 3 | % | |
|
Dimensions (LxWxH) click here for details
|
540 x 470 x 370 | mm | |
|
Weight
|
60 | kg | |
|
Cooling
|
Cooling Air / Optional Liquid | ||
|
Power requirement
|
230 VAC / 6,3 A / 1 phase / 50-60 Hz | ||
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