ATLEX-300-I Specifications
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Gas Medium
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F2 | ArF | KrF | XeCl | XeF | Units |
Wavelength
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157 | 193 | 248 | 308 | 351 | nm |
High Voltage Switching Technique
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Solid State Switch | |||||
Max. Pulse Energy 1
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1 | 10 | 15 | 8 | 7 | mJ |
Max. Average Power
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0.2 / 0.5
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2.4 / 4.0 |
4.0 / 6.5 |
2.0 / 3.0 |
1.7 / 2.5 |
W |
Max. Rep Rate
|
300 / 500 |
Hz |
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Pulse Duration 2
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5 – 8 | ns | ||||
Beam Dimensions 2 (V x H)
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4 x 6 | mm | ||||
Beam Divergence 2 (V x H)
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1 x 2 | mrad | ||||
Energy Stability (standard deviation)
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< 3 | % | ||||
Dimensions (LxWxH) click here for details
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540 x 470 x 370 | mm | ||||
Weight
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60 | kg | ||||
Cooling
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Cooling Air / Optional Liquid | |||||
Power requirement
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230 VAC / 6,3 A / 1 phase / 50-60 Hz |
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