ATLEX-LR Specifications
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Gas Medium
|
ArF | Units |
Wavelength
|
193 | nm |
Max. Pulse Energy 1
|
12 | mJ |
Max. stab. Energy | 10 | mJ |
Pulse Duration 2
|
5 | ns |
Beam Dimensions 2 (V x H)
|
4 x 6 | mm |
Beam Divergence 2 (V x H)
|
1 x 2 | mrad |
Energy Stability (standard deviation)
|
< 2 | % |
Dimensions (LxWxH) click here for details
|
540 x 470 x 370 | mm |
Weight
|
60 | kg |
Cooling
|
Air | |
Power requirement
|
230 VAC / 6,3 A / 1 phase / 50-60 Hz |
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