Fast Mueller matrix infrared ellipsometry using quantum cascade laser: Applications in material characterization

This work presents a high-speed infrared spectroscopic ellipsometer using a tunable quantum cascade laser (QCL), enabling rapid acquisition of Mueller matrix data with applications in material characterization and real-time process monitoring.
The study demonstrates:
• Measurement of complex molecular vibrations in polymers
• Characterization of anisotropic materials such as LiNbO₃
• Temperature-dependent analysis of phonon behavior
• Real-time monitoring of thin film growth (SiO₂ on Si)
By leveraging the high brightness of QCL sources, this approach significantly improves acquisition speed compared to conventional FTIR ellipsometry, opening new opportunities for in situ and in-line measurements.
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