ATLEX-300-I/ATLEX-500-I準分子雷射

產品咨詢

產品中心

ATLEX-300-I/ATLEX-500-I準分子雷射

發布時間: 2020-12-07 15:27

ATL

A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications
ATLEX-300-I/ATLEX-500-I準分子雷射特點：

Soft corona preionization
HV-solid state pulser
Laser head volume < 3l
TMC (Total-Metal-Ceramic) Vessel
Integrated vacuum pump & halogen filter
Air Cooled / Optional Liquid Cooled, active thermal management
RS-485, RS232, USB and fiber optic Interface for system integration
Flushable optics holder
Energy stabilization mode
Meets European CE-standard
RoHS compliance

ATLEX-300-I/ATLEX-500-I準分子雷射應用：

Micromachining
Laser ablation
Medicine (refractive surgery)
Spectroscopy
Metrology

ATLEX-300-I/ATLEX-500-I準分子雷射主要參數

ATLEX-300-I Specifications
Gas Medium	F2	ArF	KrF	XeCl	XeF	Units
Wavelength	157	193	248	308	351	nm
High Voltage Switching Technique	Solid State Switch
Max. Pulse Energy 1	1	10	15	8	7	mJ
Max. Average Power	0.2 / 0.5	2.4 / 4.0	4.0 / 6.5	2.0 / 3.0	1.7 / 2.5	W
Max. Rep Rate	300 / 500					Hz
Pulse Duration 2	5 – 8					ns
Beam Dimensions 2 (V x H)	4 x 6					mm
Beam Divergence 2 (V x H)	1 x 2					mrad
Energy Stability (standard deviation)	< 3					%
Dimensions (LxWxH) click here for details	540 x 470 x 370					mm
Weight	60					kg
Cooling	Cooling Air / Optional Liquid
Power requirement	230 VAC / 6,3 A / 1 phase / 50-60 Hz