IL570-光學式鍍膜監控設備-Intellemetrics

Intellemetrics IL570 光學式鍍膜監控設備，可整合至全世界各大品牌的鍍膜設備，藉由獨立開發的FilmMaker 與 FilmDirector軟體，專業協助客戶在鍍膜製程過程中實時監控鍍膜品質，提高鍍膜良率。
Intellemetrics除了提供完整的軟硬體宮客戶整合進鍍膜設備，另外提供完整的教育訓練，以下是支援整合的鍍膜技術與設備。
- Electron Beam Evaporation (with/without IAD)
- Ion Beam Sputtering
- Magnetron Sputtering
- Any other type of sputtering
支援的鍍膜監控功能如下:
- Transmission / Front Face Reflection / Back Face Reflection
- Direct Monitoring on the End Product
- In-Direct Monitoring on a Witness Piece
- Stationary Witness Pieces including Test Glass Changers
- Moving and tilting substrates on rotating platens, calottes, and even planetaries
- Monitoring from outside the chamber via vacuum windows
- Monitoring from inside of the chamber using vacuum compatible fibres and custom designed launch and receive assemblies
- Monitoring for flip-chip systems

Intellemetrics-OMS-Presentation-Feb-2021