視覺型晶圓檢測系統-VS3-Intellemetrics

Intellemetrics VS3 視覺型晶圓檢測系統，是一款高解析度的影像式監控設備，能針對像是真空蝕刻或是薄膜沉積等具備結構或圖像之製程提供即時監控，工作距離(working distance)可達到100mm至1,000mm，在工作距離600mm時具備解析度5µm及7mm x 7mm的FOV之優異表現。
VS3-視覺型晶圓檢測系統主要參數

Camera		Focuser
Sensor Type	CMOS	Focuser Travel	80mm
Sensor Size	5Mpixel, 2560× 1920 pixels	Fine Focus Reduction	10;1
Pixel Size	2.2µm	Focus Types	Manual or motorised
Interface	GigE	Resolution
		Manual	Coarse= 60µm per degree
Power Requirements			Fine=6µm per degree
Power Supply	12 to 24 Vdc	Motorised	2.7µm per step
Power Consumption	3.5W	Ambient Conditions
		Device Temperature During Operation	0℃ to 55℃ Humidity (relative, non-condensing)：20% to 80%
Connectors
Power Connector	Lemo EGG.0B.302.CLL, Pin1=+Vdc, Pin2=0V	Cetifications
Camera Image Output	Cat6e cable up to 25m length.	All versions of the VS3 Vision System are cetified RoHS and CE compliant.