ATLEX-300-FBG/ATLEX-500-FBG Specifications
|
|||
Gas Medium
|
ArF | KrF | Units |
Wavelength
|
193 | 248 | nm |
High Voltage Switching Technique
|
Solid State Switch | ||
Max. Pulse Energy 1
|
10 | 15 | mJ |
Max. Average Power
|
2.4 / 4.0 | 4.0 / 6.5 |
W |
Spatial Coherence (Vertical Beam Direction) | >300 | >300 | µm |
Max. Rep Rate
|
300 / 500 |
Hz |
|
Pulse Duration 2
|
5 – 8 | ns | |
Beam Dimensions 2 (V x H)
|
4 x 6 | mm | |
Beam Divergence 2 (V x H)
|
1 x 2 | mrad | |
Energy Stability (standard deviation)
|
< 3 | % | |
Dimensions (LxWxH) click here for details
|
540 x 470 x 370 | mm | |
Weight
|
60 | kg | |
Cooling
|
Cooling Air / Optional Liquid | ||
Power requirement
|
230 VAC / 6,3 A / 1 phase / 50-60 Hz |
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