Exicor® AT 雙折射量測系統

Hinds Instruments的雙折射測量技術已被全球業界領導者廣泛採用，以無與倫比的精度、分辨率和重複性測量雙折射並表徵材料中的應力雙折射。這些系統能夠以0.001奈米的分辨率測量光學遲滯，噪聲底線低至0.005奈米，結構堅固、動態靈活且可擴展，以滿足您應用場景的嚴苛要求。我們提供涵蓋光譜範圍（深紫外DUV、可見光VIS和近紅外NIR）的測量系統，能夠測量幾乎所有光學材料。 AT系列是Exicor雙折射測量系統產品家族的原始成員。它也包括主力型號，同時服務於研發和生產需求。

Exicor® AT 雙折射量測系統系列規格

	Exicor® 120AT	Exicor® 150AT	Exicor® 250AT	Exicor® 300AT	Exicor® 500AT
System Size	715mm (H) x 350mm (W) x 360mm (D)	413mm (W) x 693mm (D) x 909mm (H)	910mm (H) x 415mm (W) x 700mm (D)	120cm (L) x 130cm (W) x 200cm (H)	150cm (L) x 150cm (W) x 200cm (H)
Max. Sample Size	up to 120mm x 100mm	up to 150mm x 150mm	up to 250mm x 250mm	up to 300mm x 300mm and 250+mm thick	up to 500mm X 500mm and 400+mm thick

Exicor® AT 雙折射量測系統特點

Features of 120AT, 150AT & 250AT Models

Automated XY stage
2D and 3D graphical representation of birefringence parameters
Bench top design
Flexible stage design for adding custom parts holders or process aids
Advanced data analysis features included standard in user interface

Features of 300AT & 500AT Models

Heavy duty automated XY stage
2D and 3D graphical representation of birefringence parameters
3-sided easy access stage loading design
Large and flexible stage platform design for adding custom parts holders or process aids
Advanced data analysis features included standard in user interface

Exicor® AT 雙折射量測系統通用參數

	120AT	All Other AT Models
Retardation Range:	0.005 to 300+ nm	0.005 to 300+ nm
Retardation Resolution / Repeatability¹,²:	0.001 nm / ± 0.02 nm	0.001 nm / ± 0.015 nm
Angular Resolution / Repeatability¹:	0.01º / ± 0.07°	0.01º / ± 0.07°
Measurement Rate / Time³:	15 samples/sec (at 1nm spacing)	up to 100 pps / sample size dependent
Light Source Wavelength⁴:	Various (625nm standard)	Various (632.8 nm standard)
Measurement Spot Diameter⁵:	Between 1 mm and 3 mm (can be as low as <50 µm)	Between 1 mm and 3 mm (can be as low as <50 µm)
Modulation Technique / Frequency:	PEMLabsTM Photoelastic Modulator / 50 kHz and 50/60 kHz	PEMLabsTM Photoelastic Modulator / 50 kHz and 50/60 kHz
Demodulation Analysis Technique:	Hinds Instruments SignalocTM Lock-in Amplifier	Hinds Instruments SignalocTM Lock-in Amplifier
Measurement Units:	nm (retardation), ° (angle)	nm (retardation), ° (angle)

1 Typical performance at 5nm retardation
2 Up to 1.5 nm, 1% thereafter
3 Maximum data collection speed. Sample XY scan time dependent on stage movement parameters.
4 Custom wavelengths available
5 Measurement spot sizes of less than 1mm (native) require optional high resolution detector module