PPS-28精密壓電平台-Micronix

產品咨詢

產品中心

PPS-28精密壓電平台

發布時間: 2020-03-17 15:41

Micronix

The PPS-28 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 50 N (horizontal orientation). It utilizes our patent-pending multi-phase piezo motor resulting in high speed (> 2 mm/s) and high blocking force (> 2 N). The PPS-28 is available in open loop or with an external encoder. Closed-loop encoder resolution of 2 nm is achievable. Versions capable of operation in vacuum (10-9 mbar) are available. The PPS-28 is compatible with the MMC-100 and MMC-110 controllers.
• 行程： 26 - 102 mm
• 最大負載： 5 kg
• 最大定位速度： 2 mm/s
• 典型解析度： 2 nm
• 雙向重複精度： ± 20 nm
• 單向重複精度：20 nm
• 編碼器選項：類比、數位